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Glove box
Company : MBRAUN
Persons : For 2 mans
Sensitivity : H2O : < 1 ppm, O2 : < 50 ppm
Accessory : Spin-coator, UV seal dispenser, UV curing
Organic deposition
Company : SUNIC
Substrate size : Max. 15 cm x 15 cm
Vacuum condition : < 5.0 x 10-7 Torr
Crucible : 7 source
Max. Crucible temperature : < 500 °C
Metal deposition
Company : SUNIC
Substrate size : Max. 15 cm x 15 cm
Vacuum condition : < 5.0 x 10-7 Torr
Metal boat : 2 source (LiF, Al)
Encapsulation
Company : MUSASHI
Model. No : Shot Mini 200S-3A
Substrate size : Max. 15 cm x 15 cm
Pressure correction type
Dispenser pressure : Max. 405 kPa
UV-ozone
제조사 : Minuta Technoloby
Lamp : 39 W, 14 ea
Model : Ozone Cure 39
Wavelength : 185 nm, 250 nm
Active radiation area: Max. 750 mm x 500 mm
Lamp-Tray distance : 2 cm
Radiation timer : Max. 1hr
UV Curing
Company: KJUV
Substrate size: Max. 200 mm x 200 mm
Timer : 0 ~ 999 min
High pressure UV lamp (Ozone less lamp)
Atmosphere : N2
Wavelength : 365 nm
Power : 90 W/cm
Accessory
1. Bank patterned ITO substrate : 2.5 cm x 2.5 cm
2. Large sized ITO : 150 mm x 150 mm x 0.7 T
3. Encapsulation glass : 1.6 cm x 1.6 cm x 0.7 T
4. Organic materials
5. Solar cell materials
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