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Glove box
Company : MBRAUN
Persons : For 2 mans
Sensitivity : H2O : < 1 ppm, O2 : < 50 ppm
Accessory : Spin-coator, UV seal dispenser, UV curing
Organic deposition
Company : SUNIC
Substrate size : Max. 15 cm x 15 cm
Vacuum condition : < 5.0 x 10-7 Torr
Crucible : 7 source
Max. Crucible temperature : < 500 °C
Metal deposition
Company : SUNIC
Substrate size : Max. 15 cm x 15 cm
Vacuum condition : < 5.0 x 10-7 Torr
Metal boat : 2 source (LiF, Al)
Encapsulation
Company : MUSASHI
Model. No : Shot Mini 200S-3A
Substrate size : Max. 15 cm x 15 cm
Pressure correction type
Dispenser pressure : Max. 405 kPa
Accessory
1. Bank patterned ITO substrate : 2.5 cm x 2.5 cm
2. Large sized ITO : 150 mm x 150 mm x 0.7 T
3. Encapsulation glass : 1.6 cm x 1.6 cm x 0.7 T
4. Organic materials
5. Solar cell materials
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