Company : OLYMPUS
Model. No: BX51TRF
1. Magnifying capacity of a lens: 5x ~ 100x

Product name : Explorer Pro
Model. No. : EPG214C
Capacity : 210 g
Readability : 0.1 mg
Repeatability (Std.dev.) : 0.1 mg
Linearity : ±0.2 mg
Weighing Units : g, mg, ct
Stabilization time (seconds) : 4
Operating temperature range : 50° to 86° F / 10° to 30° C
Calibration : AutoCalTM Internal Calibration
Pan size (Dia.) (in/cm) : 3.5 / 9
Net Wt. (lb/kg) : 13.6 / 6

Company :
Accessory : Probe station, Hot chuck, Agilent 4156C
Chuck Size : 15 cm × 15 cm
Microscope : Object lens x5,x10, x20
Dark shield Box : 900[w]x780[d]x1000[h]
Probe Tip (Gold) : 4 개
Temperature : RT~100 ℃
Voltage : 2 µV ~ 200V
Current : 1 fA~1 A
SMU pulse width : 500 µs~100 ms

Company : Agilent
Model. No : E4980A
Frequency : 20Hz ~ 2MHz
DC bias : Max. Internal 40 V
High speed measurement : 5.6 ms

Model. No : HMS-3000
Input current : 1 nA ~ 20 mA
Resistivity : 10^-1 ~ 10⁷ Ωcm
Density : 10⁷ ~ 10²¹ cm^-1
Mobility : 1 ~ 10⁷ cm²/vs
Sample size : 6mm x 6mm ~ 20mm x 20mm

Model. No. : CMT-100MP

* Sheet resistance measurement
∙ Measuring range : 1 mΩ/sq ~2 MΩ/sq
∙ Measuring method : Contatced by four point probe.
∙ Measuring point : 1 point for only stage center.

* Specific resistance measurement
∙ Measuring method : Contacted by four point probe.
∙ Measuring range : 10 μΩ∙cm ~ 200 kΩ∙cm
∙ Measuring point : 1 point for only stage center.

* Maximum 200mm wafer or 220×220mm square sample.

Company : Kosaka Laboratory Ltd.
Model. No : ET-3000

Measurement stage : 160 X 160mm
Measurement range
1) z-axis – 10nm ~ 600μm
2) x-axis – < 52mm
Measurement pressure : 10 ~ 500μN

Model. No. Phoenix 600
Max. sample size : 300 x 350 /300 mm (12") wafer
Max. sample thickness : 50 mm
Zoom : 6.4 times
Resolution : 768 x 576 NTSC, 16 M color
Dispensing type : PC controlled automatic syringe system
Max. fluid number : 1 liquid (Option 3 liquids)
Contac angle range : 0 ~ 90 °
Accuracy : ± 0.1 °
Operating system : Windows XP/ Windows 2000
Domensions (LxWxH) : 385x290x256 mm

Company : KONICA MINOLTA
Model. No: CS-100
Accessory : Keithley 2635A source meter, Dark Box
Input voltage : 0 ~ 30 V
Limited current : 1.5 A
Luminance : 0 ~ 100,000 cd/m2
Sample size : 25 mm x 25 mm
Active area : > 2 mm x 2 mm